STAR-S800 PVD Coating System

  • Quality made by prestigious PVD manufacturing partner ICS in Italy
  • Versatile coating types covering all your needs
  • Fast deposition rate for short cycle time
  • Large effective coating zone for maximal loading
  • Integration with 30 years of experience

    • Download STAR-S800 Flyer

    Vacuum Chamber

    • Construction: 304 stainless steel with chamber shutter
    • Cooling: Double walled chamber with water cooling
    • Chamber Size: Φ 800 × 1050 mm (Φ 31.5” x 41.3”)
    • Effective Plasma Zone: Φ 500 × 600 mm (Φ 19.7” x 23.6”)

    Cathodic Arc Evaporation Source

    • Cathode: 4 sets of 611 x 191mm rectangular cathodic arc evaporator/ Auto arc triggering
    • Power Supply: 4 sets of pulse DC power supply (Huttinger German made)
    • Water Cooling

    Pump System

    • Two-stage Rotary Pump: 80 m3/h (Edwards)
    • Root Pump: 500 m3/h (Edwards)
    • Turbomolecular Pump: 2200 l/s (Edwards)
    • Vacuum gate valve: Vacuum valves (VAT)
    • Dust Filter: Filter for vacuum route

    Vacuum Measure & Component

    • Pirani Gauge: 2 set
    • Penning Gauge: 1 set
    • Baratron Gauge: 1 set

    Tools Per Batch

    1920+
    Based on ø 1/4” x 3” OAL

    Coating Types

    10+

    Runs Per Day

    4

    Gas Flow Control

    • Mass Flow Controller: 4 sets
    • Reactive Gas Filter & Valve : SS filters and valves

    Heater

    • Heater Specification: 10kW 4 sets (Swiss made)
    • Controller: 4 sets of thermocouple

    Software Function

    • User-friendly interface with touch screen control
    • Password protected coating parameter input
    • Automatic and manual process control
    • Coating log and record & Self-monitoring
    • Uninterruptible power supply (UPS) for Controller
    • Remote diagnostics
    • Safety interlock protect function

    Cycle Time

    • Batch Cycle Time: 5 Hours

    Equipment Footprint

    • Footprint: L 3226 x W 2502 x H 2113 mm (L 127.0” x W 98.5” x H 83.2”)
    • Recommended Operating Footprint: L 5000 × W 5000 mm (16’ x 16’)

    Loading Carousel

    • Carousel: 2 sets of carousel & loading wagon
    • Carousel Configuration: 8-axis planetary carousel
    • Loading Capacity - Space: Φ500 × 600 mm
    • Plates – 8 slots: ø 1/8" - ø 1/4" (or ø 4 - ø 6 mm)
    • Plates – 15 slots: ø 5/16" - ø 5/8" (or ø 8 - ø 16 mm)

    Carousel Loading Capacity

    • Regular Round Cutting Tool: ø 1/2” x 3” OAL - 600 pcs
    • Small Round Cutting Tool:ø 1/4” x 3” OAL - 1,920 pcs

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