STAR-E100 PVD Coating System
The STAR-E100 is one of the most compact commercially available PVD coating systems. The key features include fast cycle time, easy operation, and price-competitive - without comprising coating quality. The system is equipped with six sets Φ 100mm circular cathodic arc evaporators. It’s an ideal PVD coating machine for customers looking to set up in-house PVD coating from previously outsourcing parts to a 3rd party PVD coating facility.
Variety of thin film structures
The STAR-E100 PVD coating system is configured to be capable of producing single-layer, multi-layer, nano-composite and nano-gradient hard coatings.
Heavy-duty vacuum system and flexible chamber working temperature
The equipment uses turbo molecular pumps to achieve vacuum pressures down to 3 x 10^-6 Torr and operates at temperatures from 180°C to 450°C (356°F to 842°F), suitable for processing tool steels, HSS, titanium alloy, and tungsten carbide. It can also handle materials like aluminum, brass, and plastic at lower temperatures.
Cathode design for high uptime
100-mm circular cathode evaporator is easy to install and remove. Quick release of water, power and gas connections allows one operator to complete cathode switch within 15 minutes. Each cathode material runs on average of 50 - 100 cycles.
4-axis planetary carousel
Planetary design of the carousel maximizes the loading capacity of any tools and parts within Φ 350 × 500 mm effective coating area. It can load up to
704 pieces of 1/4” OD x 2” OAL (6 mm OD x 50 mm OAL) round tools
320 pieces of 1/2” OD x 3” OAL (12 mm OD x 70 mm OAL) round tools
144 pieces of 3/4” OD x 4” OAL (20 mm OD x 100 mm OAL) round tools
Friendly user interface
15” touch screen allows operator to monitor the process easily with its graphical platform. All standard coating types can be processed in fully automatic mode or manual mode if required.
Process log and remote diagnosis
The equipment software allows process monitoring and keeps every process log, so it allows engineers to diagnose on-line and help trouble-shooting together in the shortest time manner when needed.
Vacuum Chamber
- Construction: Stainless steel with chamber shutter
- Cooling: Double walled chamber with water cooling
- Chamber Size: Φ766 x 800 mm | Φ30.2" x 31.5”
- Effective Plasma Zone: Φ350 x 440mm | Φ13.8" x 17.3"
Vacuum Arc Evaporation Source
- Evaporator: 6 sets of Φ 100 mm circular cathodic arc evaporator
- Power Supply 6 sets of 200A digital DC power supply /Auto triggering mechanism
Pump System
- Primary Mechanical Pump: 65 m3/h (Leybold or equivalent)
- Turbomolecular Pump: 1600 l/s (Leybold or equivalent)
- Dust Filter: Dust filter for vacuum route
Vacuum Measure & Component
- Piezo Gauge: 1 set
- Pirani Gauge: 1 set
- Penning Gauge: 1 set
- Baratron Gauge: 1 set
Gas Flow Control
- Mass Flow Controller: Nitrogen: 1 set
- Mass Flow Controller: Argon: 1 set
- Reactive Gas Filter & Valve : 1 set
Tools Per Batch
Coating Types
Runs Per Day
Heater
- Heater Specification: 12kW (Chamber sides and door)
- Controller: 1 set of PID temperature control / 2 sets of thermocouple
Software Function
- User-friendly interface with touch screen control
- Password protected coating parameter input
- Automatic and manual process control
- Coating log and record & Self-monitoring
- Uninterruptible power supply (UPS) for Controller
- SMC water flow sensor
- Remote diagnostics
- Safety interlock protect function
Cycle Time
- Batch Cycle Time: 2-3 Hours
Equipment Footprint
- Footprint: L 2505 × W 1807 × H 1910 mm / L 98.6” × W 71.1” × H 75.2”
Loading Carousel
- Carousel Configuration: 3-axis planetary carousel
- Loading Capacity – Weight: 500 kg
- Loading Capacity - Space: Φ350 x 440mm
