LEAN 710 PVD Metalizing System

Introducing the LEAN 710 – a groundbreaking innovation in thin-film deposition technology for PVD metalizing. Its field-convertibility sets the LEAN 710 apart, allowing seamless transitions between thermal evaporation and magnetron sputtering, or vice versa. With the LEAN 710, you unlock the power of multiple technologies within a single platform, providing unmatched flexibility and versatility.

Applications:

  • Automotive lighting & trim
  • LED lighting
  • Chrome finishing
  • Decorative packaging
  • Solar energy
  • Plastic hardware
  • Appliance handles & knobs

Features:

  • Rapid cycle in 4 minutes
  • Multiple matched pumping package options
  • Large plenum cryotrap, options for cryochiller
  • Up to 60kW per cathode for sputtering
  • PLC-controlled process, open-architecture with password protection for customer-controlled program modifications
  • Data-logging
  • Fixturing and process development support
  • Ethernet-ready for remote support

Vacuum Chamber

  • Chamber Size: Φ 825 × 1575 mm (Φ 32.5” x 62.0”)
  • Effective Plasma Zone: Φ 710 × 1220 mm (Φ 28.0” x 48.0”)

Evaporation Source

  • Thermal Evaporation
  • Single or dual cathode sputtering process available

Pump System

  • Mechanical Pumping Package (Leybold, or equivalent)
  • Root Pump: 15 hp motor (Leybold, or equivalent)
  • Diffusion Pump: Leybold, or equivalent

Vacuum Measure & Component

  • MKS capacitance manometer: 1 set
  • INFICON wide-range cold cathode/Pirani Gauge: 1 set
  • INFICON Pirani Gauge: 2 sets

Coating Cycle

    A complete cycle may include the following operations in less than 4 minutes:
  • Pumping
  • Pre-treat glow
  • Base coat HMDSO
  • Metal deposition
  • Top coat HMDSO
  • Post-treat etching
  • Venting

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